Josh,
        Newest techniques, combination plasma vacuum dehydration and
vapor deposition allows monolayer with total adhesion to the surface of
any vaporizable chemical.  Contact me for technical papers.  Bill Moffat

________________________________

From: [email protected] on behalf of Kevin Paul Nichols
Sent: Fri 12/18/2009 9:59 AM
To: [email protected]; General MEMS discussion
Subject: Re: [mems-talk] fluorinated polymer for replication process



Josh,

FDTS (perfluorodecyltrichlorosilane) is pretty standard still, and easy =
to find.

"Fluorinated polymer" probably refers to Teflon AF (amorphous
fluoropolymer). You can spin it on, and a single 100 ml bottle costs
around $500 or so from Dupont's "Teflon Store." It works great as an
anti-adhesion layer for PDMS, but it'll never be as smooth as a nice
mono-ish layer of FDTS; your mold will be wavy on the 100's of nm to
single-digit micron scale.

- Kevin