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MEMSnet Home: MEMS-Talk: silicon membranes
silicon membranes
2009-12-20
Andrea Mazzolari
2009-12-21
Kuijpers, Peter
2009-12-21
Nathan McCorkle
2009-12-21
Morten Aaroe
2009-12-21
Brian Stahl
2009-12-22
Albert Henning
2009-12-23
Chilcott, Dan - NV
2009-12-24
Andrea Mazzolari
2009-12-25
Andrea Mazzolari
2009-12-28
Albert Henning
2009-12-28
Albert Henning
silicon membranes
Andrea Mazzolari
2009-12-20
Hi all,

i need to realize silicon memabranes of thickness 29um. I can not start
from SOI wafers, cos the membrane will remain under stress state due to
the oxide in the frame.

I plan to realize the job by KOH etching, but how to precisely control the
membrane thickness ? Is there any suggestion ?

Thanks,
Andrea

reply
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