Dear Everyone,
Need help:
1\ after soft bake, i will see some bubbles inside of SU8 film, does it have
some bad effect?
2\ Could you give me some suggestion about developing SU8?
I use BTS-220 now, after developing, my figure are not swelling, but will
adhere with each other when the distance is so small(~2um). I think maybe I
do something wrong in develop step.
Peng Xu
University of Louisville