Andrea,

You may be able to find an FTIR microscope. Using this you could use the etalon
to calculate the thickness.


Good Luck.
Rob MacDonald
Shearwater Scientific


Hi All,

i need to realize silicon membranes of thickness 14 and 29 um in (100)
silicon.

I need to measure membrane thickness with a tollerance of 0.5um.

Any suggestion about a way to measure membrane thickness with a so good
resolution ?

Best regards,
Andrea