Dear Dong,

  what is the distance between the top Ag and carbon structure covered by
SOG? What value of voltage did you apply?

Regards.
Karolina

---------- Wiadomość przekazana dalej ----------
From: Dong Cai 
To: [email protected]
Date: Fri, 8 Jan 2010 20:29:13 -0800 (PST)
Subject: [mems-talk] shortage across insulation layers
Hi,

I have a 3D nanostructure made of carbon materials. Two dielectric layers
are deposited on it. The first layer is 100 nm alumina by ALD, then the
second one is spin-on-glass (512B). The chip was top covered by 200 nm
silver film.  But I frequently measured a short between the top Ag and
bottom carbon.

Need help! Thanks!

Dong