Shange the design of the fingers so that there is a small spike at the bottom of
the comb fingers. The spike should help reduce the amount of film stress on the
fingers so that they do not stick or curl. You might have to do some redesign
on the dimensions of the fingers for the added material. I would experiment
some on the dimensions of the spike where it would keep the fingers from
sticking but not interfere with the operation of the device.
James W. Carroll Jr.
____________________Reply Separator____________________
Subject: Comb Fingers
Author: [email protected]
Date: 2/25/98 2:08 PM
Hello,
We have been making devices using comb drives. One problem we have
encountered is the curling of fingers which resulted in fingers making
contact with electrodes underneath. Sometimes the fingers curl up. The
fingers are typically 150 microns long, 3 microns wide, and has 5
microns curvature. The obvious suspects are film stress and poor
release. Yet the film stress is about 10 Mpa, and standard release
procedures are being followed. Has anyone solved this problem, and
achieved consistant yield? Any comments, suggestions, or information
will be very much appreciated.
Ying Hsu
Irvine Sensors Corp.
3001 Redhill Ave.
Costa Mesa, CA
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Message-Id: <[email protected]>
Date: Wed, 25 Feb 1998 14:08:28 -0800
From: "Ying W. Hsu"
Reply-To: [email protected]
Subject: Comb Fingers
To: [email protected]
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