Dear all MEMS-list subscribers,

One very important piece of information while designing
micro-fabrication flows is known etch-rates of your materials in
different etchants. For several years I have made good use of  Etch
Rates for Micromachining Processing, part I and II by Williams et. al
to get a first idea of possibilities. These papers are certainly a
good source, but they are not complete and they are by now a few years
old.

Does anyone here know about a more complete compilation of etch rates,
or perhaps a smaller, but complimentary collection? I am interested in
papers as well as books or other media, if available.

best regards,

/Sven Holmström, Koc University, Istanbul, Optical Microsystems
Laboratory (http://mems.ku.edu.tr/)

Work phone: +90 212 338 1 772
Mobile phone:+90 5383365642
FAX: +90 212 338 1548 (Please note my name)
E-mail: [email protected]

Work address:
Koç University
Dept. of Electrical Engineering
Rumeli Feneri Yolu, Sariyer
34450, Istanbul-Turkey