Hi Jiho,

Depending on your requirements, you could try 1165 from microchem (microstrip
2001 is another brand).  I generally heat this to 80C for stripping positive
resists.  I'll often follow this up with an O2 plasma descum (5min/100W/0.3T).
It has worked very well for me (I've used it for LOR10B and Shipley S1811).

Alasdair

-----Original Message-----
From: Jiho Song [mailto:[email protected]]
Sent: Monday, January 25, 2010 10:57 PM
To: General MEMS discussion
Subject: [mems-talk] PR stripping

Hello all,

I'm having some problems with PR stripping off from the Si chip.
Because I have a small structure that when I put in ultrasonic bath with
acetone, an entire device lifted off.

Thus, I have changed to O2 plasma for 5min (1 Torr and 200 W) and acetone
bath for 10 min. But I am not sure it strips off PR clearly.

Does anyone have any ideas?

--
Great day,
-- Jiho Song