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MEMSnet Home: MEMS-Talk: 1165 and GaAs compatibility?
1165 and GaAs compatibility?
2010-01-27
mikas remeika
2010-01-27
Andy Irvine
2010-01-28
Morrison, Richard H., Jr.
1165 and GaAs compatibility?
mikas remeika
2010-01-27
In a recent post it was mentioned the Microposit 1165 attacks GaAs at
some slow rate. Could anyone share their specific experiences
regarding this? I.e. under what conditions the etch might occur and
approximately what etch rate is expected? This is very worrying to me
since the spec sheet seems to imply that 1165 is GaAs compatible.

Also, what about Remover PG ? Are there any known semiconductors that
it attacks?

thank you,
-mikas
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