I used 1165 with GaAs wafers and I never had an issue, 1165 is mostly
NMP (solvent) I do not think it attackts 1165.

Rick


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of mikas remeika
Sent: Wednesday, January 27, 2010 2:36 PM
To: General MEMS discussion
Subject: [mems-talk] 1165 and GaAs compatibility?

In a recent post it was mentioned the Microposit 1165 attacks GaAs at
some slow rate. Could anyone share their specific experiences
regarding this? I.e. under what conditions the etch might occur and
approximately what etch rate is expected? This is very worrying to me
since the spec sheet seems to imply that 1165 is GaAs compatible.

Also, what about Remover PG ? Are there any known semiconductors that
it attacks?

thank you,
-mikas