Well, I tried to use oxygen plasma to strip SU8 for some experiments and I
always got a white film on top of SU8 but to significant removal. I used SU8
2075 and thicknesses between 25 and 50 µm.

maria

-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of David Pierce
Sent: 1. februar 2010 17:34
To: General MEMS discussion
Subject: Re: [mems-talk] Stripping SU-8

Paul,

I use an oxygen plasma to strip SU-8 and it seems to work well.

David


On Feb 1, 2010, at 10:04 AM, Paul Nguyen wrote:

> Hi all,
>
> Regarding Su-8 resist, does anyone have experience on how hard to
> strip this resist?  My colleagues have mentioned to me that they have
> had a hard time stripping it.
>
> Thanks,
> Paul