Any one with a dicing saw can do this for you. Just need to use 30-45u
diamond resin blade.

Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Hong Wang
Sent: Wednesday, February 10, 2010 9:23 PM
To: [email protected]
Subject: [mems-talk] dice Pyrex wafer with SU-8 structures

Hello, I'm wondering what is the best way to dice 4 inch 500um thick pyrex
wafer with SU-8 structure on it to ~1cm by 1cm small pieces. Any company can
do it?

Thank you,

Hong