How to electroplate uniform metal on a 4inch wafer?
Will Yu
2010-02-11
Dear all,
I tried to electroplate metals on a 4 inch wafer.
The current was applied with one alligator clip
clamped on the edge of the wafer. However,
the metal was very un-uniform with the edges
much thicker than the center. Does anyone
know how to improve the uniformity in this
case? Any suggestion is appreciated.
Thanks,
Will