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MEMSnet Home: MEMS-Talk: Selective etchant
Selective etchant
1998-11-07
Zeting Pei
Selective etchant
Zeting Pei
1998-11-07
Hello,

Dose anyone know the selective etchant for silicon oxide agaist chromium? My
structure is Cr/SiO/Cr and try to wet etch SiO. Your help is deeply
appreciated.

Zeting Pei


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