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MEMSnet Home: MEMS-Talk: Al thin film dissolved inside hot water
Al thin film dissolved inside hot water
2010-02-18
li shifeng
2010-02-19
David Casale
2010-02-22
Morrison, Richard H., Jr.
Al thin film dissolved inside hot water
li shifeng
2010-02-18
Hi All,

I deposited 70nm - 80nm Al thin film on the glass coverslips with and without
any adesion layer. I found Al thin film was dissolved inside hot water Note:
90C) after 30 mins to 45mins. This really bothered me quite a bit. What are the
possible reasons for this and how to solve this problem?

Thanks!

Shifeng
reply
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