Hi everyone,
After I did DRIE etching on silicon samples, I observed grass existing
in trenches.
I use Al as hard mask. Is there any way I can get
grasses away from these samples?
Thanks,
Li. Zhang
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Graduate Student
Edward P. Fitts Department of Industrial and Systems Engineering
North Carolina State University
Raleigh, NC 27695-7906
USA
TEL: (919) 413-5459
Email: [email protected]
Web: http://www.ise.ncsu.edu
http://www.nnf.ncsu.edu
