Hi all,
I am planning to use spin-on-glass. Could you tell me if there are any
process tricks to cover highly non-planar devices like adjusting viscosity,
coating rpm etc.?
Furthermore I need a SiOx of very low thermal conductivity. Could you tell
me any supplier which meets my requirements?
Thank you in advance
* Dr. Daniel Grimm
* IFW Dresden
* - Institute for Integrative Nanosciences -
* E-Mail: [email protected]
* Phone: +49 351 4659-314
* Mobile: +49 177 4926561