I just saw this book on Amazon. It might be helpful to the current
discussion.

Germanium Silicon: Physics and Materials, Volume 56 (Semiconductors and
Semimetals) by John C. Bean, Robert Hull, Robert K. Willardson, and Eicke R.
Weber (Hardcover - Nov. 16, 1998) used from $31.43

Roger Brennan
Applications Director
Solecon Labs



-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Ned Flanders
Sent: Saturday, February 20, 2010 5:26 AM
To: [email protected]; General MEMS discussion
Subject: Re: [mems-talk] SiGe deposition


Hi Andrea,

Would you be so kind and get back to us when you find some useful
references? That is, could you please post here the articles you found
most helpful to you?

Thanks in advance

m