Hello Andrea,

 I recommend you a book or papers of Prof. Jan Dziuban.
e.g.: *Bonding** in microsystem technolog*y, Springer 2006

There is also described many data about KOH etching he and his group
investigated on Si wet etching also with such fracture like the roughness.

Best Regards.

 Karolina

From: "Andrea Mazzolari" 
To: "General MEMS discussion" 
Date: Sat, 6 Feb 2010 11:53:58 +0100 (CET)
Subject: [mems-talk] Silicon etch low roughness

Hi All,

i need to etch (100) silicon at low etch rate (not more than 20um/hour)
and i need very very low roughness.

I can not use HNA solutions, i can use KOH or TMAH with surfactants.
Any suggestion about the optimal etching condition for this job ?

Thanks,
Andrea