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MEMSnet Home: MEMS-Talk: UV tape not coming off of silicon wafer.
UV tape not coming off of silicon wafer.
2010-03-02
Harshal Surangalikar
2010-03-04
Becker, Matthias
UV tape not coming off of silicon wafer.
Becker, Matthias
2010-03-04
Dear Harshal,

had you checked the temperature during UV exposure, high temperature may "bake"
/ stick the tape to your wafer.

How about UV dosis, meassured in mJ/cm², only exposure time is not enough
information. If UV dosis is too high, higher than required, tape can also stick
to your waver.

Best regards Matthias

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