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MEMSnet Home: MEMS-Talk: Small Silicon Wafer Piece Cleaning
Small Silicon Wafer Piece Cleaning
2010-03-09
Li. Zhang
2010-03-09
Tony Price
2010-03-10
A.ALLOUCH
2010-03-19
mikas remeika
2010-03-10
Li. Zhang
2010-03-10
Tony Price
Small Silicon Wafer Piece Cleaning
A.ALLOUCH
2010-03-10
Hi,

Another efficent method is to use Piranha ( H2O2+HESO4    1/1) put the
H2O2 before the acid in the beaker  and mix for 1 min, then put your
wafer and wait for 2 mn and you will have very good results.

Alaa

Tony Price a écrit :
> Hi Li,
>
> I work with samples that have similar dimensions.  I typically do a
> USB clean on my samples in acetone and methanol before I do any
> fabrication on them.  Put acetone in a small beaker and submerge your
> samples in the acetone.  Put water in the bath container and then
> place the small beaker of acetone in the water.  (Make sure there
> isn't too much water or the beaker may float around and possible tip
> over.) Then I repeat the process with methanol.  Do not pour the
> acetone and methanol directly into the bath container.
>
> Hope this helps.
>
> Tony

--
Alaa el dine ALLOUCH
Doctorant au LAAS-CNRS-Groupe N2IS
7 Av colonel Roche, 31077 Toulouse
Tél : 05 61 33 78 71


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