Look up the Massoud Model on Google.  It was devised by Hisham Massoud,
now Professor of EE of Duke, but who wrote a Science Citation classic
paper on this topic while doing experiments relative to his PhD at IBM
Yorktown.  There are online calculators which include it.

---
Albert K. Henning, PhD
Director of MEMS Technology
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA  95008
408-379-9069  ext 101
[email protected]


-----Original Message-----
From: Ravi Shankar [mailto:[email protected]]
Sent: Thursday, March 11, 2010 9:24 PM
To: [email protected]
Subject: [mems-talk] Ultra thin oxide growth

Hi,

    What is the model used to predict the oxide growth of very thin
layers where deal-grove model fails? Can someone suggest any
literature for thin oxide growth, say  less than 25 nm?

Thanks in advance.
A. Ravi Sankar