We have experience problems using O2 ashers on chrome.  Be careful.

Dan

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf
Of Andrew Irvine
Sent: Friday, March 26, 2010 7:04 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Cleaning optical masks

Just to re-visit a wise warning from a recent poster, Piranha etch (at
110C or not) is seriously hazardous, and we need to be flagging up
safety advice when suggesting stuff.

I don't see a problem with using an oxygen asher, and if there is no
problem (anyone?), do that instead, Mikas!

Andy