A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Gold etchant for PDMS substrates
Gold etchant for PDMS substrates
2010-04-04
nidhi maheshwari
2010-04-05
Nathan McCorkle
Gold etchant for PDMS substrates
nidhi maheshwari
2010-04-04
Dear All,

I have to pattern gold onto PDMS for electrodes fabrication. My device
requirements are such that I can not perform a lift-off. I have tried
etching gold (KI+I2+water) at room temperature. After etching, the
PDMS substrates take a reddish hue. These substrates do not bond to
any other material nor a subsequent layer of PDMS onto it gets cured.
Can anyone please suggest some alternative etchant or some method by
which I can cure subsequent PDMS (have already tried curing it at high
temperature for longer durations). Is there some well defined
chemistry between PDMS and gold etchant which I am missing here?

Thanks
Nidhi
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
MEMS Technology Review
Mentor Graphics Corporation
Addison Engineering