Hi, Paul,

    Thanks for your suggestion. Would you mind telling me the detail of your
process, like power, pressure, as well as time. I used 50mTorr, at 300W for
20min, they are still there.

Thanks a lot

Xiaoyong

--Forwarded Message Attachment--
From: [email protected]
To: [email protected]
Date: Sat, 3 Apr 2010 15:12:06 -0500
Subject: Re: [mems-talk] ProteK B3 coating layer removal

Hi Xiaoyong,

I used Protek from Brewer Science about 2 years ago.  What I used to
completely strip my 10-15um Protek were O2 Plasma (with high O2 dosage at
quite a longer time) followed by SC1 clean.

You may want to try this process to see if it helps.

Regards,
Paul