Dear Colleagues,

We are seeking a source for a small quantity of SOI wafers with a Si
thickness of about 50 microns for deep silicon RIE. We would prefer 4"
diameter wafers, but other sizes may be acceptable. Substrate/overall
thickness should be as large as possible.

As an alternative to these, we are considering bonding a 50-micron Si wafer
to glass. Does anyone know good sources for thin wafers and flat glass
substrates, and someone who can do the bonding?

If anyone has any leads, we'd much appreciate it.

Thanks very much,

Adam Cohen
University of S. California