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MEMSnet Home: MEMS-Talk: RE: Comb Fingers
RE: Comb Fingers
1998-02-27
Kevin A. Shaw
RE: Comb Fingers
Kevin A. Shaw
1998-02-27
Hello,
        Alternatively, one could use single-crystal silicon for the structural
elements.  We often fabricate beams that are several hundred microns long
without significant stress problems.  This can be done by forming the
structural elements from the substrate silicon by use of plasma etching
techniques.  I don't think that this is what you had in mind, but it is
interesting to consider.

                Kevin Shaw


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