Plasma bonding works well.  Bill Moffat

-----Original Message-----
From: [email protected] [mailto:mems-
[email protected]] On Behalf Of A.ALLOUCH
Sent: Tuesday, May 18, 2010 8:06 AM
To: General MEMS discussion
Subject: [mems-talk] pyrex/pyrex anodic bonding

Hi,

I am trying to bond a pyrex wafer to another 4 inch pyrex wafer by anodic
bonding.  For that I use an amorphous silicon deposited by PECVD as intermediate
layer (less than 1 µm thickness) or polysilicon deposited by LPCVD.  The
parameters which I use are: 450°C on both wafers, 1200 V and 200N, but in both
case I don't have a good bonding. if you have any suggestions, they will be
welcome.

best,

Alaa

--
Alaa el dine ALLOUCH
Doctorant au LAAS-CNRS-Groupe N2IS
7 Av colonel Roche, 31077 Toulouse
Tél : 05 61 33 78 71

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