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MEMSnet Home: MEMS-Talk: SiO2-Glass anodic bonding
SiO2-Glass anodic bonding
2010-05-18
Miyakawa, Natsuki
2010-05-18
Bill Moffat
2010-05-19
Starlight
2010-05-19
Khaldoun Halalo
SiO2-Glass anodic bonding
Miyakawa, Natsuki
2010-05-18
Dear all,

Is it possible to bond thermally oxidized Si-Wafer (wafer back side is free of
oxide) with glass-wafer anodically? If yes, with which parameter? I tried 500°C
/ 600V (which work well for Si-glass anodic bonding), but it didn't work.

Thank you!

Natsuki
reply
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