Bill,

You need an ion barrier on the glass face such as Si3N4 to trap the Na+
ions, an oxide surface must be on the opposite side on layer 2 that is to be
bonded against the ion barrier.

Best regards,

Julian.



----- Original Message -----
From: "Bill Moffat" 
To: "General MEMS discussion" 
Sent: Tuesday, May 18, 2010 8:29 PM
Subject: Re: [mems-talk] SiO2-Glass anodic bonding


Plasma bonding works.  Bill Moffat