To [email protected]


I would like to make Si membrane with thickness of 1-3 micron (if
possible, submicron) clamped directly on Si wafer. The membrane which I
want is square, rectangle, or ribbon (both ends clamped) shape with size
of 1cm X 1cm to 2cm X 2cm. I have a photolithography with
masks, wet etching, dry plasma etching.


Does anyone know about the proceedure or refference papers?


Best regards,


mori



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Kiyotaka Mori (Graduate Student)

University of Maryland at College Park,
Tel: 301-405-5229
Fax: 301-314-9467
E-mail: [email protected]
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