Hi,

40-100 nm should do it, it depends upon your application.

The thicker the Si3N4 the more voltage or higher temp etc, its a
relationship between volts, current, density and temperature.

you will need to experiment a bit, go for a thinner Nitride layer, but you
will have to ask your coater what they can provide in terms of thickness.


Best regards,

Julian.



----- Original Message -----
From: "A.ALLOUCH" 
To: "General MEMS discussion" 
Sent: Wednesday, June 02, 2010 1:39 PM
Subject: Re: [mems-talk] pyrex/pyrex anodic bonding


Hi,

Thank you for your answer. What about the thikness of SI3N4?

best,

Alaa


Starlight a écrit :
> Hi,
>
> Use an ion barrier such as Si3N4 to trap the Na+ ions, then a glass to
> Si3N4 interface at 400 C should bond.
>
> Best regards,
>
> Julian.