Andrea,

You can use a thermal oxide mask with patterned alignment wheel to establish
orientation. We use a shallow TMAH test etch to align the mask.

Best regards,
Glenn

-----Original Message-----
From: Andrea Mazzolari [mailto:[email protected]]
Sent: Wednesday, June 09, 2010 2:21 PM
To: [email protected]
Subject: [mems-talk] wafers supplier


Hi all,

i'm looking for a supplier of silicon wafers who could provide (110)
wafers with <111> flat. I need flat accuracy less than 0.01 deg. I can
accept not rounded flats, and even flat grinded flats.
Is there someone who knows a supplier who could provide this material ?

Best regards,
Andrea