O2 plasma with a large ICP power won't work?

On Thu, Jun 17, 2010 at 11:28 AM, Tingjie Li  wrote:
> Hi All,
>
>  Does anyone know how to carry out isotopic etching on negative photoresist?
> Thank you so much!
>
> --
> Best Regards/
> Gary  Li
> The University Of Western Ontario
> 1151 Richmond Street
> London, Ontario,Canada
> N6A 5B9

*  Zou Jie (Jay)
*  Department of Physics
*  University of Florida
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