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MEMSnet Home: MEMS-Talk: RE: Electrodeposited photoresists
RE: Electrodeposited photoresists
1998-10-27
Roberto Igal Chertkow
1998-10-27
Matthias Heschel
RE: Electrodeposited photoresists
Matthias Heschel
1998-10-27
To all who are interested in ED photoresists:

list of manufacturers (taken from Electronic Packaging & Production, Feb
1992/67):
Du Pont, Kansai Paint, MacDermid, Nippon Paint, Nippon Petrochem,
Shipley.

This list might need an update.

We have been using two ED resists so far. Both are manufactured by
Shipley: Neg. resist Eagle 2100 EDPR and Pos. resist PEPR 2400. We use
both resists for Micromechanics applications. In our experience the
negative resist is easier to process.

Regards,
________________________________________________________________________
_
Matthias Heschel
Microelectronics Center
Technical University of Denmark, Bldg. 345 east
DK-2800 Lyngby


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