Dear all,

I am using lithogrphy and etching process to define silicon NW.
the cross section is close to a square (70nm*70nm).
I am wondering whether there is any way to smooth the edge of NW to make the
cross section like a circle or semicicle, which means I want to make a round
instead of a sharp edge at least on the top surface.

any comments are welcome.

sincerely

Yu CHEN