Antonella,

We have had significant problems spinning SU8 onto glass substrates. I
assume what you are doing is similar since you have a SiO layer. We found
that extended drying, pre-treatment with TMS silanes, and sequential
deposition of SU8 in thin and then thick layers all proved to be
problematical. It appears that the SU8 requires a very hydrophobic surface
which silicon offers but which glass does not.

Having said all this, should you come across a good method for spinning SU8
onto your surface, we would appreciate you forwarding this information to
us.

P.S. one thing we did not try was to prime the surface with a well known
hydrophobic silane (chlorodimethyl silane) this may in fact work. Also you
should know that SU8 will spin effectively onto gold deposited onto glass.

Best of luck,

Joseph Cefai


Microsensors in Space and Terrestrial Biology Ltd.
14 Quarry Road,  Swansea SA5 9DJ
Tel: ++ 44 1792 701453 or
++ 44 385 264781
Fax: ++ 44 1792 701453



-----Original Message-----
From:   Antonella Benvenuto [mailto:[email protected]]
Sent:   20 October 1998 09:56
To:     [email protected]
Subject:        About SU-8


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Dear MEMS researchers,
I'm now using EPON SU-8, but I have a problem to make a good adhesion
between the Si wafer (1 micron SiO2 layer on) and the SU-8.
Please does anyone tell me processing guide lines about?
Thank you very much,
Antonella


-----------------------------------
Antonella Benvenuto
Electronic Eng.
Mitech Lab-Scuola Superiore Sant'Anna
Via Carducci 40
56127 Pisa- Italy
Tel +39 050 883403
Fax +39 050 883402
e-mail: [email protected]
-----------------------------------


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Dear MEMS researchers,

I'm now using EPON SU-8, but I have a problem to make a good adhesion
between the Si wafer (1 micron SiO2 layer on) and the SU-8.

Please does anyone tell me processing guide lines about?

Thank you very much,

Antonella

 

-----------------------------------

Antonella Benvenuto

Electronic Eng.

Mitech Lab-Scuola Superiore Sant'Anna

Via Carducci 40

56127 Pisa- Italy

Tel +39 050 883403

Fax +39 050 883402

e-mail: [email protected]

-----------------------------------

 

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