How wide are they?

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of nahid
vahabi
Sent: Saturday, September 18, 2010 1:56 AM
To: General MEMS discussion
Subject: [mems-talk] releasing cantilever beams without release holes



Hello folks,

Just wondering if any of you guys have released a structure like  cantilever
beams without release holes. There was a mistake in the mask and now we try
to find a good recipe for dry or wet etch to release the structure.

Any comments are appreciated.

Nahid