Hi Everyone,
I am working on forming thin film thermoelectrets with a system
typically used for anodic or thermal compression bonding, think Suss or
EVG bonder. I am not having any serious success according to the
electrostatic volt meter. I have done a good amount of reading but I
figure I am missing something basic.
My main materials are PI-2611 and AF Teflon. These materials are spin
cast on a Silicon wafer and solvent is baked out at 90C before loading
between "dummy" wafers.
I welcome comments and advice.
Best Regards
Mark Crain
Cleanroom Manager & PhD Student
University of Louisville
[email protected]