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MEMSnet Home: MEMS-Talk: Re: HF resist
Re: HF resist
1998-11-07
bob lyness
1998-11-07
Seung-Jin Yoo
Re: HF resist
Seung-Jin Yoo
1998-11-07
Hi? This is JIN from UT at Austin.

chrome + gold layer can be a mask layer for HF for a long period of time.

Good Luck.

At 06:08 AM 10/20/98 PDT, you wrote:
>Hello Mems Workers
>
>Could anybody give me any leads on a substance that could be used as a
>masking material for HF for a long period of time.
>
>Thanks in advance
>
>Julian Shapley
>University of Cardiff.
>UK
>
>______________________________________________________
>Get Your Private, Free Email at http://www.hotmail.com
>
>
************************************************
Seung-Jin Yoo
The University of Texas at Austin
Microelectronics Reseach Center

e-mail:[email protected]
voice: (office) 512-471-8104
************************************************


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