Hi Rob, We've been working with pyrex about 1mm thick and sparingly about 1.
5mm, So what's your problem now?

Li Zhuang
University of Science and Technology of China

>Wondering if anyone has any experience anodic-bonding pyrex wafers to
>silicon wafers, where the pyrex is thicker than normal.

>For a 100mm wafer typical thicknesses I've worked
>with are in the 400-600um range. Has anyone had experience working with
>wafers 2 or 3 times thicker?

>Rob MacDonald
>Shearwater Scientific