We have bonded to 10mm glass for an industrial yeast filter for beer!

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From: [email protected] on behalf of Dean Hopkins
Sent: Thu 10/14/2010 18:12
To: [email protected]
Subject: [mems-talk] pyrex wafer thickness for anodic bonding



Wondering if anyone has any experience anodic-bonding pyrex wafers to silicon
wafers, where the pyrex is thicker than normal.

For a 100mm wafer typical thicknesses I've worked with are in the 400-600um
range.
Has anyone had experience working with wafers 2 or 3 times thicker?

Rob MacDonald
Shearwater Scientific