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MEMSnet Home: MEMS-Talk: SIGE etch rate with HNA
SIGE etch rate with HNA
2010-10-15
morad massalha
SIGE etch rate with HNA
morad massalha
2010-10-15
I'm trying to develop process to etch SIGE, I need good selectivity for SI
instead SIGE, the suggested solution HNA HF:Nitric acide:Acetic acid, I don't
have any idea about etch rate and the ratio of the mix, can any body assist me
with etch rates and mix ratio?



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