Andrew:

Ti and Au react to form intermetallic compounds.  You need to put
a Pt or Pd barrier layer in between the Ti and the Au.  We discovered
all these effects 30 years ago when we were using Au metallization
in devices.

-=RBF=-




>What am i doing wrong with Ti adhesion layers?  I am thermally
>evaporating 50-100nm Au films on glass substrates with 2-5nm Ti adhesion
>layers.  After a few days, the films turn from reflective Au to a frosty
>white color.  Is this titanium oxidation or some other diffusion process
>I am unfamiliar with?
>
>Thanks
>
>L. Andrew Lyon, Assistant Professor
>School of Chemistry and Biochemistry
>Georgia Institute of Technology
>Atlanta, GA  30332
>
>[email protected]
>
>