Hi Guys,

I have 200nm chrome between 2 silicon-oxide layers. the top oxide was
patterned and etched by RIE to expose the underlying chrome. However,
the chrome can not be etched.

Any opinions ?

Can i blame it to chrome diffusion into the top oxide layer and created
non-etchable film ?

Is there a way to etch chrome oxide ? i tried gold etchant as
recommended by a memsnet user, but that didn't work.

thanks

Salam R. Gabran, MASc.
Research associate, PhD. Candidate
Center for Integrated RF Engineering
(CIRFE) Group
ECE Dept., University of Waterloo,
200 University Avenue West
Waterloo, Ontario, N2L3G1