Hi Pradeep,

I too am interested in dry-laminated photoresist based lithography.

Could you give me suggestions on where to find such photoresist ?

Thanks and best regards,

Andrea

> You should try Dry-laminated photoresist based lithography.
>
> It is working fine for wafers having etched cavities, as resist does not
> go
> inside the cavities. Some of my wafers have 1-2 mm wide cavities. still i
> can get satisfactory lith results.
>
> Thanks,
> Pradeep