1. Use EDG

2. laser ablation

Looking for your positive feedback.

Thanks & Regards

Bhupesh Bishnoi
Indian Institute of Technology Madras


On Tue, Nov 16, 2010 at 11:15 AM, abhaya joshi  wrote:

> There can be two problems; as i suspect.
>
> 1) Your oxide layer is not completly removed. so your Cr is not going in Cr
> etchant.
>
> 2) Or u might be using KI based gold etchant.which will not affect the Cr,
> but HNO3+HCl based gold etchant (Aqua regia)  will etch Cr very fast.But be
> careful for underetching.
>
> How you are depositing top oxide layer?
>
> Best Luck
>
> -abhay Joshi