Hello Binh,

Must the layer be Au/Ti only? If not, I think you can sputter Cr on your glass
wafer first, then your desired layers.

Cr offers a better adhesion on glass wafer. Hope this can help you.

BR,
YN WANG

> Date: Thu, 2 Dec 2010 20:06:02 -0800
> From: [email protected]
> To: [email protected]
> Subject: [mems-talk] Au/Ti adhesion problem
>
> Hi all
>
> I'm having a problem with the Au/Ti adhesion on glass wafer as follow :
>
> I had finished the Au/Ti coating process on the glass wafer (piranha treated),
there is no problem. Then I used some of them for my experiment at that time
(the adhesion was good) and kept the others for the later use.
>
> After a few days when I used the others and there was a problem with the Au/Ti
layer. They became sensitive and easily peel off even when washing with DI
water. I don't know why there is a different adhesion between the first and the
second time using. Does anyone face this problem before ?
>
> Thank you
>
> Binh Tran