The cheapset way is to go to a dentist and ask for a diamond or Ti carbide
drill. Attach the tip to a Dremel high speed tool. Then using some putty,
create a bath of water around the place where you want to hole and drill
using the machine weight only - not force. Make sure to hold the dremel
vertically, the best is if you have a stand.

shay

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Petru
Lunca Popa
Sent: Sunday, December 05, 2010 8:39 PM
To: General MEMS discussion
Subject: [mems-talk] how to drill a hole in a silicon wafer

Hi,

I have just an ordinary Si/SiO2 commercial wafer and I want to to
put a hole in it . The shape is not so important. Area should be around one
mm squared or less.

Any ideea how to do this without breaking the wafer?
Mechanical or chemical methods?

Thank you
Petru