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MEMSnet Home: MEMS-Talk: how to drill a hole in a silicon wafer
how to drill a hole in a silicon wafer
2010-12-05
Petru Lunca Popa
2010-12-06
Xiaohui Lin
2010-12-07
shimul saha
2010-12-06
Kuijpers, Peter
2010-12-06
Shay Kaplan
2010-12-07
Nabhiraj Yalagoud
2010-12-07
Andrew Sarangan
2010-12-09
Nabhiraj Yalagoud
2010-12-09
Ned Flanders
2010-12-10
Gomez, Mikel
how to drill a hole in a silicon wafer
Shay Kaplan
2010-12-06
The cheapset way is to go to a dentist and ask for a diamond or Ti carbide
drill. Attach the tip to a Dremel high speed tool. Then using some putty,
create a bath of water around the place where you want to hole and drill
using the machine weight only - not force. Make sure to hold the dremel
vertically, the best is if you have a stand.

shay

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Petru
Lunca Popa
Sent: Sunday, December 05, 2010 8:39 PM
To: General MEMS discussion
Subject: [mems-talk] how to drill a hole in a silicon wafer

Hi,

I have just an ordinary Si/SiO2 commercial wafer and I want to to
put a hole in it . The shape is not so important. Area should be around one
mm squared or less.

Any ideea how to do this without breaking the wafer?
Mechanical or chemical methods?

Thank you
Petru
reply
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