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MEMSnet Home: MEMS-Talk: spin coater vacuum path
spin coater vacuum path
2010-12-09
Jia Yao
2010-12-09
Andrew Sarangan
2010-12-09
Jia Yao
2010-12-09
Brad Cantos
2010-12-09
Gary Hillman
2010-12-10
Jia Yao
2010-12-10
Morrison, Richard H., Jr.
2010-12-10
Gary Hillman
2010-12-10
Jia Yao
2010-12-10
Shay
2010-12-09
Andrew Sarangan
2010-12-10
David Grove
2010-12-09
ZijianCao
2010-12-09
Jia Yao
2010-12-10
Huy
2010-12-13
Jia Yao
2010-12-14
Paul Grasso
spin coater vacuum path
Jia Yao
2010-12-09
Thank you Andrew for your suggestion. I have taken the parts out and had
them cleaned but still it shows insufficient vaccum value v~6 or 7. What
else could I possibly check? Thank you!

On Thu, Dec 9, 2010 at 9:03 AM, Andrew Sarangan  wrote:

> Probably the blockage has moved further downstream, and into the
> vacuum solenoid. Try removing the solenoid and cleaning it.
reply
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